Solutions for high-purity gas systems
UHP gases used in semiconductor production must be particularly pure and free of foreign substances. This is the only way to ensure the safe and economical production of microelectronic components. This places high demands on the media supply. We offer pipes and fittings from our SCiMax® brand for these demanding tasks.
For the highest requirements
Gas produced, stored and distributed under strict controls flows through the pipes of fit-ups and hook-ups in FABs.
We are just as demanding when it comes to our SCiMax® brand pipes and fittings: corrosion-resistant stainless steels, surfaces with Ra values, electropolished and packaged in ISO Class 4 and 6 clean rooms.
The SCiMax®-Ecosystem
Purity is not achieved by a single product, but by a perfectly coordinated system. The SCiMax® ecosystem combines tubes, fittings, adapters and customised assemblies into a uniform high-purity flow system.
Each component follows the same purity and manufacturing standards for consistent quality throughout the entire process.
Where purity meets performance
In semiconductor production, absolute purity determines quality, yield and process stability. SCiMax® systems are specially designed for these highly sensitive applications, from wafer manufacturing to CMP and lithography processes to the supply of high-purity chemicals and process gases.
Each component contributes to preventing contamination, reducing particle formation and ensuring the purity of the process media at all times.
From the supply unit to the process chamber: SCiMax® stands for uncompromising purity, traceability and technical precision in every phase of semiconductor manufacturing. Our systems meet the most stringent international standards for UHP materials, surfaces and packaging – and are ready for next-generation manufacturing processes.
SCiMax® – developed for purity in the semiconductor industry.
Trust through tested quality
Every SCiMax® component stands for documented purity and verifiable precision. From the material batch to the final packaging, every production step is tested, traced and documented in accordance with international high-purity standards. This promise of quality forms the basis for the trust of our customers – worldwide.
Quality control & testing procedures
- 100 % visuelle und dimensionale Endkontrolle
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Helium leak test up to 1×10⁻⁹ scc/sec
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Surface analysis according to ASME B46.1 / SEMI F19
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Regular internal audits and documentation checks
Certifications & Standards
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ASME BPE – Bioprocessing Equipment Standard
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SEMI F19 / F57 – Semiconductor Process Standards
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EN 10204 3.1 – Factory test certificates for material quality
Wissen schafft Reinheit
Wissen ist die Grundlage jeder Innovation im High-Purity-Bereich.
SCiMax® vereint jahrzehntelange Fertigungserfahrung mit tiefem Prozessverständnis – und teilt dieses Know-how mit Ingenieuren, Entwicklern und Qualitätsverantwortlichen weltweit. Unsere Whitepaper, Fachartikel und Videos bieten Einblicke in die technischen Hintergründe moderner UHP-Fertigung und Oberflächenbearbeitung.
Know-how für die Reinheit von morgen.
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